The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.

实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。

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The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.

实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。

youdao