The present invention provides a bug repairing apparatus which irradiates laser lights distributed uniformly on a base plate.
本发明提供缺陷修复装置，其向基板照射具有均匀强度分布的激光。
The present invention provides a bug repairing apparatus which irradiates laser lights distributed uniformly on a base plate.
本发明提供缺陷修复装置，其向基板照射具有均匀强度分布的激光。
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