It is necessary to design a simple and useful approach for capacity planning due to requirement for high equipment utilization.
半导体晶圆厂的设备非常昂贵，对设备利用率的要求较高，设计一套简单实用的办法进行产能规划是十分必要的。
The disadvantages are mainly high equipment costs and plugging of the lines by sediment, salt encrustation, or algae.
缺点主要是设备费用高，管道易被泥沙、盐分结晶或藻类植物堵塞。
The vacuum membrane distillation units, the device and the method have the advantages of high heat recovery rate, energy saving, high equipment integration degree, low operation cost and the like.
本发明的减压膜蒸馏组件单元及其装置和方法具有热回收率高、节能、设备集成化程度高、操作成本低等优点。
The vacuum membrane distillation units, the device and the method have the advantages of high heat recovery rate, energy saving, high equipment integration degree, low operation cost and the like.
本发明的减压膜蒸馏组件单元及其装置和方法具有热回收率高、节能、设备集成化程度高、操作成本低等优点。
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