As feature size shrinks, especially with the use of resolution enhancement techniques, accurate measurement of image quality parameters in situ is indispensable for the lithographic tools.
随着光刻特征尺寸的不断减小，尤其是随着分辨力增强技术的使用，像质参数的原位检测已成为先进的投影光刻机中不可或缺的功能。
As feature size shrinks, especially with the use of resolution enhancement techniques, accurate measurement of image quality parameters in situ is indispensable for the lithographic tools.
随着光刻特征尺寸的不断减小，尤其是随着分辨力增强技术的使用，像质参数的原位检测已成为先进的投影光刻机中不可或缺的功能。
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