We have studied the relations of the enhanced diffusion to residual defects and lattice restoration in detail.
观察了增强扩散与剩余缺陷和晶格恢复之间的关系。
In addition, the transient enhanced diffusion during the rapid annealing of boron implanted silicon has also been discussed.
本文还讨论了瞬态退火过程中的增强扩散效应。
Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.
利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。
Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.
利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。
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