Retarding potential analyzer (RPA) had been used to measure the ion energy distribution at a certain location downstream of the low-power hall thruster at various status.
本文使用阻滞势分析器对霍尔推力器羽流的离子能量分布进行了实验研究,获得了推力器在不同工况下羽流场中关注位置的离子能量分布状况。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机,以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机,因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
An ion energy auto analyzer was designed and implemented for the rapid measurement of plasma ion energy distribution.
为了快速获得等离子体离子能量的分布规律,研制了一套等离子体离子能量自动分析器。
The ion temperature and plasma potential were measured by a multi-grid energy analyzer in an electrostatic plugging cusp system MM-4. The results show-that the plasma potential is?
本文叙述了用多栅能量分析器测量静电堵漏会切系统中的离子积分能谱,从而得到离子温度、等离子体电位的原理和方法。
The ion temperature and plasma potential were measured by a multi-grid energy analyzer in an electrostatic plugging cusp system MM-4. The results show-that the plasma potential is?
本文叙述了用多栅能量分析器测量静电堵漏会切系统中的离子积分能谱,从而得到离子温度、等离子体电位的原理和方法。
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