A new detecting technique-correction technique for datum in submicron DSW is introduced from the basic point of view.
本文从最基本的角度出发，介绍了亚微米分步重复投影光刻机中的一项新的检测技术——基准校正技术。
As the existent system is renewed by use of DSW-01 water level meter and related techniques, thus it is running normally now.
用DSW - 01型精密数字水位仪及相关技术对原系统进行了更新改造，从而保证了该系统的正常运行。
As the existent system is renewed by use of DSW-01 water level meter and related techniques, thus it is running normally now.
用DSW - 01型精密数字水位仪及相关技术对原系统进行了更新改造，从而保证了该系统的正常运行。
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