The design and fabrication of high aspect-ratio hard X-ray zone plates by X-ray lithography are studied.

对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。

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The design and fabrication of high aspect-ratio hard X-ray zone plates by X-ray lithography are studied.

对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。

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