Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films.

氧分压和沉积速率对YSZ薄膜残余应力的影响。

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Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films.

氧分压和沉积速率对YSZ薄膜残余应力的影响。

youdao