The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅，研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅，研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
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