The issue of interconnect capacitance rising from very large scale integration(VLSI)with a decreased feature size and increased number of wiring layers is described.
阐述了超大规模集成电路( VLSI)特征尺寸的减小及互连线层数增加引起的互连线电容增加的问题。
The issue of interconnect capacitance rising from very large scale integration(VLSI)with a decreased feature size and increased number of wiring layers is described.
阐述了超大规模集成电路( VLSI)特征尺寸的减小及互连线层数增加引起的互连线电容增加的问题。
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