The method can substitute a wet cleaning method to clean completely the deposition chamber, is easy and rapid to operate, can reduce the idle time of equipment and improve the productivity.
本发明的化学气相沉积室的清洁方法，可以代替湿法清洁方法实现对沉积室的全面清洁，操作方便、快捷，并可减少设备的闲置时间，提高生产效率。
The wet type dust-removing apparatus comprises a venturi tube, a cyclone body, a wet cap, a foam dedusting chamber, a water blocking gate, a water supply system and an inducing draught device.
该除尘器装有文氏管、旋风体、湿帽、泡沫除尘室、挡水栅、供水系统和引风装置。
The wet type dust-removing apparatus comprises a venturi tube, a cyclone body, a wet cap, a foam dedusting chamber, a water blocking gate, a water supply system and an inducing draught device.
该除尘器装有文氏管、旋风体、湿帽、泡沫除尘室、挡水栅、供水系统和引风装置。
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