The overexposure technique is valuable for fabrication of devices with stabilized linewidth such as integrated optical gyroscope with spiral waveguide.
过曝光技术对线宽稳定度要求较高的器件，比如具有螺线波导的集成光学陀螺的制作有较重要价值。
This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air-bridge structure and collecting waveguide;
本论文对空气桥结构光子晶体带隙限制光波导及其接续光波导的制作工艺进行了研究。
In this thesis, ion implantation has been used to form the waveguide and the performance of the waveguide has been studied in order to obtain the optimal fabrication conditions.
在本论文中，我们即采用了离子注入方法来制备光波导，研究所制备的波导的性能，以优化制备条件。
The fabrication process of a compact planar waveguide etched-grating(EDG) demultiplexer based on silicon-on-insulator(SOI) is studied.
研究了基于绝缘材料上的硅（SOI）材料的平面波导刻蚀光栅分波器的主要制作工艺。
Characteristics of ring resonator in integrated optical waveguide gyroscope are key factors in design and fabrication of ring resonator.
光波导陀螺谐振腔特性是光波导陀螺谐振腔设计和制备中的关键因素。
The key point of the fabrication of integrated optical devices is to prepare the planar waveguide structure with high quality.
在器件制作方面，最关键的是制作高品质的平面光波导。
The specific properties of the waveguide have made waveguide play an important role in the fabrication of various optical devices.
光波导以其独特的性质，在各种光器件的制造中起着重要的作用。
The specific properties of the waveguide have made waveguide play an important role in the fabrication of various optical devices.
光波导以其独特的性质，在各种光器件的制造中起着重要的作用。
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