The local heights of wafer surface are measured by the linear variable differential transformer (LVDTs) when the different offsets between wafer and wafer chuck exist.
在晶圆与承片台存在不同偏移量时，利用线性差分传感器在线测量晶圆上不同点的局部高度；
The local heights of wafer surface are measured by the linear variable differential transformer (LVDTs) when the different offsets between wafer and wafer chuck exist.
在晶圆与承片台存在不同偏移量时，利用线性差分传感器在线测量晶圆上不同点的局部高度；
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