Another is a ceramic dielectric waveguide covered by a silicon wafer with high resistivity.
另一种是用高阻硅薄片覆盖在陶瓷介质波导上组成的。
With large size wafer, the uniformity of thickness & Resistivity was out of control line.
主要是随着衬底尺寸的增长，外延层的厚度、电阻率均匀性无法满足要求。
With large size wafer, the uniformity of thickness & Resistivity was out of control line.
主要是随着衬底尺寸的增长，外延层的厚度、电阻率均匀性无法满足要求。
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