This paper primarily introduces the design process of bidirectional flexure hinge and universal flexure hinge, which are used as rotational join of 6 degrees of freedom micro table.
介绍了6自由度微动工作台的原理、结构、设计计算方法，弹性导轨及柔性铰链在微动工作台中的应用。
This paper primarily introduces the design process of bidirectional flexure hinge and universal flexure hinge, which are used as rotational join of 6 degrees of freedom micro table.
介绍了6自由度微动工作台的原理、结构、设计计算方法，弹性导轨及柔性铰链在微动工作台中的应用。
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