The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
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