• The third stage etching in current method is a time-fixed etching, which easily causes under etching or over etching of the metal layer.

    现有刻蚀形成金属线时第三阶段刻蚀采用了固定时间的刻蚀,极易造成金属刻蚀不足刻蚀的问题。

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  • The influence on over etching and under etching to IC layout is analyzed, the computation model and realization method of IC critical area are presented.

    论文在分析刻蚀欠刻蚀IC版图影响基础提出了基于工艺偏差影响的IC关键面积计算模型实现方法

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  • Under this etching condition the sensitivity and the efficiency of the Fuji film for the registration of protons have been determined.

    蚀刻条件下测定富士记录质子灵敏度效率

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  • The contact bulges under the bridge are achieved by the full etching and partial etching of the polyimide sacrificial layer.

    在工艺上,特别采用聚酰亚胺牺牲层进行刻蚀刻蚀改进加工流程来实现背面的接触点

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  • This result is just opposite from the ion implantation enhanced etching which was reported by many authors under wet etching.

    结果报道离子注入增强腐蚀的结果正好相反。

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  • In the third chapter Porous silicon was prepared by pulsed and dc electrochemical etching methods under the equivalent etching condition.

    第三章研究脉冲电化学腐蚀制备均匀发光多孔

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  • The etching of CVD diamond thick films was accomplished by the ECR plasma under optimized pressure conditions and the etching mechanism is studied.

    利用等离子体在优化气压条件下化学气相沉积金刚石进行了刻蚀, 并研究刻蚀机理

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  • The etching of CVD diamond thick films was accomplished by the ECR plasma under optimized pressure conditions and the etching mechanism is studied.

    利用等离子体在优化气压条件下化学气相沉积金刚石进行了刻蚀, 并研究刻蚀机理

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