The calculation results are compared to test data with good agreement, verifying the effectiveness of the method.
计算结果与试验值符合较好,证实了该方法的有效性。
In this paper, a look-ahead search algorithm is proposed to optimize the design of masks. Applied to test data, the algorithm reduces more than 20% masks compared to the traditional method.
本文提出了一种基于预测搜索的优化算法,利用该方法对掩膜板进行了优化设计,测试结果显示,其减少的掩膜板数量超过了传统方法的20%。
In this paper, a look-ahead search algorithm is proposed to optimize the design of masks. Applied to test data, the algorithm reduces more than 20% masks compared to the traditional method.
本文提出了一种基于预测搜索的优化算法,利用该方法对掩膜板进行了优化设计,测试结果显示,其减少的掩膜板数量超过了传统方法的20%。
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