A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
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