This invention provides gas injector apparatus that extends into a growth chamber in order to provide more accurate delivery of thermalized precursor gases.
本发明提供了延伸到生长室中以提供热化前体气体的更准确输送的气体注射器装置。
This invention provides gas injector apparatus that extends into a growth chamber in order to provide more accurate delivery of thermalized precursor gases.
本发明提供了延伸到生长室中以提供热化前体气体的更准确输送的气体注射器装置。
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