Based on the silicon thermal flow sensor, a FEA model is given.
基于作者所在实验室研制的硅热流量传感器，给出了其有限元模型。
A partial flow heated gas meter based on intellecture thermal flow sensor and its working principle is introduced in this paper.
介绍了一种分流支管量测流量转换为主管道气体流量的仪器设备。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
Thermal mass flow sensor has unique constant temperature principium as mathematical model for measuring medium mass flow without compensation of temperature and pressure.
采用独特的恒温原理建立数学模型，测量出介质的质量流量，无须温度和压力补偿。
The thermal sensor had a large lag phase, so the data got by the sensor of digital mass flow controller should be compensated in advance.
热式传感器有很大的滞后环节，在数字质量流量控制器中需要对传感器数据进行补偿。
Vortex flow meter, pressure sensor and thermal couple are installed on the platform.
新的实验台增加了压力传感器、涡轮流量计和热电偶等自动测量传感器和仪表。
Vortex flow meter, pressure sensor and thermal couple are installed on the platform.
新的实验台增加了压力传感器、涡轮流量计和热电偶等自动测量传感器和仪表。
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