Layout design is quite important in multi-sensor integrated weather chips. The influence of the temperature field, induced by thermal anemometer, on pressure sensitive films is analyzed by FEA method.
针对多传感器集成的气象芯片设计中的布局问题，采用有限元方法分析了热风速计工作中产生的热场对气压膜的影响。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
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