A theoretic model for prediction of sample temperature during plasma based ion implantation was established, and computer simulation was done with the model.
建立了等离子体基离子注入过程中试样温度预测的理论模型，应用这个模型进行了一系列数学模拟。
A theoretic model for prediction of sample temperature during plasma based ion implantation was established, and computer simulation was done with the model.
建立了等离子体基离子注入过程中试样温度预测的理论模型，应用这个模型进行了一系列数学模拟。
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