Using calibrated infrared temperature meter, we studied the influence factor on temperature of silicon heater in PLD system.
研究了PLD系统中用硅板做衬底加热器时影响衬底温度的几个因素。
Using calibrated infrared temperature meter, we studied the influence factor on temperature of silicon heater in PLD system.
研究了PLD系统中用硅板做衬底加热器时影响衬底温度的几个因素。
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