The invention relates to a charge-super sensitive Coulomb meter and its preparation method that belongs to microelectronic device and micro-processing method.
本发明属于微电子器件和微加工方法，特别是涉及一种对电荷超敏感的库仑计及其制备方法。
The invention relates to a charge-super sensitive Coulomb meter and its preparation method that belongs to microelectronic device and micro-processing method.
本发明属于微电子器件和微加工方法，特别是涉及一种对电荷超敏感的库仑计及其制备方法。
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