It was found that the substrate floating potential changes a lot when the grounded state of arc source changed.

在实验过程中还发现弧源不同的接地方式对基片台悬浮电位有很大的影响。

youdao

It was found that the substrate floating potential changes a lot when the grounded state of arc source changed.

在实验过程中还发现弧源不同的接地方式对基片台悬浮电位有很大的影响。

youdao