In order to quickly generate three-dimensional model of MEMS and to realize process step simulation, a voxel-based fast MEMS process simulation method is given.
为了快速生成MEMS模型和实现加工的过程模拟，给出一种基于体素的快速MEMS工艺模拟方法。
In order to quickly generate three-dimensional model of MEMS and to realize process step simulation, a voxel-based fast MEMS process simulation method is given.
为了快速生成MEMS模型和实现加工的过程模拟，给出一种基于体素的快速MEMS工艺模拟方法。
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