Each 562 stage axis is equipped with a non-influencing locking mechanism to maintain sub-micron positioning when locking or unlocking.
每个阶段562轴配备了非锁定机制，以维持影响亚微米定位时锁定或解锁。
Each 562 stage axis is equipped with a non-influencing locking mechanism to maintain sub-micron positioning when locking or unlocking.
每个阶段562轴配备了非锁定机制，以维持影响亚微米定位时锁定或解锁。
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