The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array.
本发明涉及一种用于操作磁控管溅射阴极、特别是阴极管或形成 一个阵列的几个阴极管的方法。
The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array.
本发明涉及一种用于操作磁控管溅射阴极、特别是阴极管或形成 一个阵列的几个阴极管的方法。
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