Meanwhile, the high risk of punch-through due to process limitation was described when channel length became smaller and source junction became shallower.

m时，由于制造工艺的局限性以及沟道长度变短、结深变浅后，器件穿通风险加大。

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Meanwhile, the high risk of punch-through due to process limitation was described when channel length became smaller and source junction became shallower.

m时，由于制造工艺的局限性以及沟道长度变短、结深变浅后，器件穿通风险加大。

youdao