The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit.
利用实时相位检测电路，从正弦相位调制干涉信号中解出被测量物体表面形貌的相位。
The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit.
利用实时相位检测电路，从正弦相位调制干涉信号中解出被测量物体表面形貌的相位。
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