The single crystal furnace is a special equipment of growth single crystal for LSI.
炉是生长大规模集成电路所需要硅单晶的专用设备。
This paper proposes a practical speed control system for single crystal furnace lifting mechanism.
文章提出了一种实用的单晶炉提拉速度控制系统。
The design of the single crystal furnace temperature control system is realized by analog electronic, microcomputer unit control skills.
文中应用模拟电路、微机控制技术实现了对控温精度要求很高的直拉单晶硅炉温度控制系统的设计。
According to requirement of control system in electron beam single crystal furnace, hardware composition and software functions of the control system are described in detail.
结合电子束单晶熔炉对控制系统的要求，分别对控制软件的作用和构成进行了详细的说明。
The single crystal furnace is a special equipment of growth single crystal for LSI. This paper mainly introduces the design of vacuum system and charge system of crystal furnace.
单晶炉是生长大规模集成电路所需要硅单晶的专用设备。本文主要介绍了单晶炉的真空系统与充气系统的设计。
Aiming at the single crystal growth furnace situation and existing problem, a new style of single crystal growth furnace automatic control system with utility and economic is introduced.
文章针对某单晶拉伸炉的现状及存在的问题，介绍了一种经济实用的单晶炉自动化控制系统。
Introduction: TDR-JN series of automatic crystal growing furnace are special equipment applied with Czochralski Technique for Silicon Single crystals materials growing.
TDR—JN系列全自动晶体生长炉是采用直拉法生长单晶硅材料的专用设备。
A speed control system of single-crystal furnace lifting mechanism based on mixed self-adjusting fuzzy PID controller is introduced in this paper.
采用自调整因子混合式模糊pid控制方法，对单晶炉的提拉速度进行控制。
The utility model relates to a hollow shaft magnetic fluid sealing device of a non-locking device used for a single crystal silicon furnace and silicon chip furnace equipment.
本实用新型涉及一种用于单晶硅炉、硅芯炉设备的无锁紧装置的空心轴磁流体密封装置。
The utility model relates to a hollow shaft magnetic fluid sealing device of a non-locking device used for a single crystal silicon furnace and silicon chip furnace equipment.
本实用新型涉及一种用于单晶硅炉、硅芯炉设备的无锁紧装置的空心轴磁流体密封装置。
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