A suitable vacuum sealing technology should not only ensure the performance of the devices, but also simplify processes and reduce the product cost.
合适的真空密封技术不仅能够保证和提高MEMS器件的性能，同时可以简化工艺步骤，降低器件成本。
A suitable vacuum sealing technology should not only ensure the performance of the devices, but also simplify processes and reduce the product cost.
合适的真空密封技术不仅能够保证和提高MEMS器件的性能，同时可以简化工艺步骤，降低器件成本。
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