A new method to improve the temperature dependence of polycrystalline silicon pressure sensor is presented.
提出了一种新的改善传感器温度特性的方法。
High temperature SOI Monocrystal silicon pressure sensor is a new type high temperature pressure sensor with high performances.
单晶硅soi高温压力传感器是一种新型高性能高温压力传感器。
The paper describes that a silicon pressure sensor with plate graph CAD software design is carried out on IBM and its series of compatible microcomputers.
介绍在IBM及其兼容系列微型机上，实现硅压力传感器版图CAD软件的设计方法。
A measuring system is studied to test coupled pair in oil nozzle of engines by means of the pneumatic sensing method and the diffused silicon pressure sensor.
研究了利用压力位移气动传感方法和以扩散硅压力传感器组成测试系统对发动机喷油嘴偶件进行检测。
This paper discusses the mathematical mode for diffused silicon pressure sensor. Then describes a method for measuring with accuracy in wide temperature range.
本文首先建立了扩散硅压力敏感器件的数学模型，进而讨论了一种可同时获得高精度宽温度范围的方法。所得结果与实验相符。
The mechanism and the key process of vacuum silicon pressure sensor are presented in this paper. And give the measuring results and conclusion, discuss the applications of the element.
本文叙述了采用单晶硅压阻效应制作真空变送器的机理和关键工艺．给出了测量结果和结论，讨论了该元件应用范围等问题。
This paper presents the designing theory of a circular E-type silicon micro pressure sensor.
本文介绍了圆形膜片E型杯硅微压传感元件的设计原理。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
An. integrated MOS ring oscillator pressure sensor with silicon box structure, having frequency as output is reported.
本文报道了一种硅盒结构的、具有频率输出的集成MOS环振式压力传感器。
Silicon piezoresistance transducer is a new type pressure sensor which has smaller size, higher frequency response and other advantages.
硅压阻式传感器是一种新型压力传感器，它具有体积小，频响高等优点。
This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor which used in the measurement of shock wave superpressure.
阐述了用于冲击波超压测量的压阻式高频动态压力传感器的设计与开发。
Sealing gel is dripped into the metal ring and filled around the silicon piezoresistive pressure sensor, so as to isolate the chip of the sensor from the outside environment.
在金属圈内滴封包封胶，填充在硅压阻式压力传感器的四周，隔 绝传感器芯片与外界环境的接触。
A new type of non-silicon thin film grid pressure sensor was brought forward and devised to detect and measure the pressure distribution between the bodies s touching surfaces of hemiplegics patient.
针对偏瘫病患者身体接触面间的压力分布检测，提出并研发了一种基于压阻效应的新型非硅薄膜网格压力传感器。
This paper is presented for the intelligence pressure sensor of the silicon piezoresistive type to introduce its microcomputer testing, operation process and controlling parts.
本文主要介绍智能化硅压力传感器的微机检测、运算处理和控制。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
The pressure sensor is one of the core components in radiosonde. There are still some deficiencies in traditional silicon piezoresistive sensors.
气压传感器是探空仪中的核心部件之一，传统的硅压阻传感器应用于探空仪中还存在着一些不足。
The pressure sensor is one of the core components in radiosonde. There are still some deficiencies in traditional silicon piezoresistive sensors.
气压传感器是探空仪中的核心部件之一，传统的硅压阻传感器应用于探空仪中还存在着一些不足。
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