A new type of non-silicon thin film grid pressure sensor was brought forward and devised to detect and measure the pressure distribution between the bodies s touching surfaces of hemiplegics patient.
针对偏瘫病患者身体接触面间的压力分布检测，提出并研发了一种基于压阻效应的新型非硅薄膜网格压力传感器。
Based on theoretical study, the experimental results demonstrate the feasibility of use of porous silicon thin film as humidity sensor.
在理论研究的基础上，经实验验证了多孔硅薄膜用于湿度传感器的可行性。
We propose that the cathode emitter arrays covered with nano crystalline silicon film may considerably enhance the sensitivity of the sensor.
讨论了在阴极发射体阵列上淀积纳米硅薄膜，提高器件灵敏度的设想。
We propose that the cathode emitter arrays covered with nano crystalline silicon film may considerably enhance the sensitivity of the sensor.
讨论了在阴极发射体阵列上淀积纳米硅薄膜，提高器件灵敏度的设想。
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