In addition, the annealing process of SiC films is mostly carried out in vacuum, argon gas or nitrogen gas ambience.
另外，对碳化硅薄膜的退火处理大多是在真空、空气、氩气或氮气气氛下进行。
In addition, the annealing process of SiC films is mostly carried out in vacuum, argon gas or nitrogen gas ambience.
另外，对碳化硅薄膜的退火处理大多是在真空、空气、氩气或氮气气氛下进行。
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