Applying the patterning method can manufacture a wider word line under the condition of maintaining an element density, avoid a short-channel effect and improve the efficiency of the element.
藉由本发明可以在维持元件密度的情况下制作较宽的字线,避免短沟道效应,提升元件的效能。
Applying the patterning method can manufacture a wider word line under the condition of maintaining an element density, avoid a short-channel effect and improve the efficiency of the element.
藉由本发明可以在维持元件密度的情况下制作较宽的字线,避免短沟道效应,提升元件的效能。
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