Ions accelerated by the electric field in the sheath form a shape of beam and a flux distribution on the target surface, which are strongly dependent on the applied voltage.
离子被鞘层中的加速电场加速，以束流的形式注入到工件表面，而束流分布的情况与作用电压有着十分密切的关系。
Ions accelerated by the electric field in the sheath form a shape of beam and a flux distribution on the target surface, which are strongly dependent on the applied voltage.
离子被鞘层中的加速电场加速，以束流的形式注入到工件表面，而束流分布的情况与作用电压有着十分密切的关系。
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