This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.

本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。

youdao

This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.

本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。

youdao