In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.
在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。
In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.
在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。
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