The burst release of wafer protected by blank MS was restrained, however, no obvious restrain effect was observed for wafer protected by PVA for its quickly falling off.
膜片表面空球和PVA涂层两种保护形式中，空球保护可明显减弱膜片的初期突释，而PVA涂层保护由于其很快脱落，对膜片的突释抑制不明显。
The burst release of wafer protected by blank MS was restrained, however, no obvious restrain effect was observed for wafer protected by PVA for its quickly falling off.
膜片表面空球和PVA涂层两种保护形式中，空球保护可明显减弱膜片的初期突释，而PVA涂层保护由于其很快脱落，对膜片的突释抑制不明显。
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