Secondly, the reflective characteristic of micro mirror is analyzed. And then a normalized equation that governs the static characteristics of the electrostatic driving structure is derived.
其次，分析了光开关微反射镜的反射特性，然后推导了归一化的光开关静电驱动结构力矩平衡特性方程。
Secondly, the reflective characteristic of micro mirror is analyzed. And then a normalized equation that governs the static characteristics of the electrostatic driving structure is derived.
其次，分析了光开关微反射镜的反射特性，然后推导了归一化的光开关静电驱动结构力矩平衡特性方程。
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