A reflecting hologram diffraction grating was fixed to the stage to form a closed loop displacement measuring system.
固定在工作台上的全息衍射光栅实现了对工作台位移的高精度闭环检测。
A reflecting hologram diffraction grating was fixed to the stage to form a closed loop displacement measuring system.
固定在工作台上的全息衍射光栅实现了对工作台位移的高精度闭环检测。
应用推荐