The results of cleaning using the new type of cleaning technique and RCA standard cleaning technique are compared. The results are obtained by X ray photoelectron spectra?
利用红外吸收谱、X射线光电子谱和原子力显微镜等，把它和标准rca清洗工艺的清洗效果做了比较。
The results of cleaning using the new type of cleaning technique and RCA standard cleaning technique are compared. The results are obtained by X ray photoelectron spectra?
利用红外吸收谱、X射线光电子谱和原子力显微镜等，把它和标准rca清洗工艺的清洗效果做了比较。
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