After thermal annealing about 60% of radiation damage induced by implantation can be restored.

在热退火后，约60%的注入引起的辐射损伤可以得到恢复。

youdao

After thermal annealing about 60% of radiation damage induced by implantation can be restored.

在热退火后，约60%的注入引起的辐射损伤可以得到恢复。

youdao