The structural and territorial design of PZT thin film micro-sensors is processed.
对硅基锆钛酸铅(PZT)压电薄膜微传感器进行了结构和版图设计。
Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
In this paper, the piezoelectric thin film prepared by hydrothermal method has good piezoelectric performance by experiments. This study for the PZT thin film is the base for film's application.
实验验证，本文利用水热合成法制备的PZ T压电薄膜具有优良的压电性能，为压电薄膜在微泵上的应用奠定了基础。
The experiments show that the PZT ferroelectric thin film with pe-roskite structure can be produced using reasonable process parameters.
实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的PZT铁电薄膜。
The experiments show that the PZT ferroelectric thin film with pe-roskite structure can be produced using reasonable process parameters.
实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的PZT铁电薄膜。
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