Firstly, PSMs were prepared by the pulsed electrochemical etching method and the experimental conditions were optimized.

用电化学脉冲腐蚀法制备多孔硅微腔，优化了实验参数。

youdao

Firstly, PSMs were prepared by the pulsed electrochemical etching method and the experimental conditions were optimized.

用电化学脉冲腐蚀法制备多孔硅微腔，优化了实验参数。

youdao