Slit widths of instrument for measuring resolution of diffraction gratings in detail are discussed on theory of instrument profile.
用仪器函数理论对分辨率测试仪的缝宽作了详细讨论，并提出了改变缝宽来确定光栅实际分辨极限的新方法。
Automatic profile and flatness control system is composed of shape control software, hardware and network configuration and measuring instrument.
自动板形控制系统包括板形控制软件、硬件及网络配置和检测仪表。
The instrument can measure not only 2d profile but also 3d topography, and it has large measuring range, high precision, small measuring touch force and more parameters.
该仪器不仅可进行二维轮廓测量，还可进行三维形貌测量，具有大量程、高精度、小测量力和更多测量参数等特点。
The instrument can measure not only 2d profile but also 3d topography, and it has large measuring range, high precision, small measuring touch force and more parameters.
该仪器不仅可进行二维轮廓测量，还可进行三维形貌测量，具有大量程、高精度、小测量力和更多测量参数等特点。
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