The line density of varied-line-space gratings have been measured by using interferometry. The principle and geometry are introduced, the methods of data processing and the results are given.
用干涉法测量变线距光栅的线密度，给出了测量原理、实验中的光路、数据处理的方法、测量结果。
The line density of varied-line-space gratings have been measured by using interferometry. The principle and geometry are introduced, the methods of data processing and the results are given.
用干涉法测量变线距光栅的线密度，给出了测量原理、实验中的光路、数据处理的方法、测量结果。
应用推荐